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期刊


ISSN1063-7397
刊名Russian Microelectronics
参考译名俄罗斯微电子学
收藏年代2002～2023



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2002 2003 2004 2005 2006 2007
2008 2009 2010 2011 2012 2013
2014 2015 2016 2017 2018 2019
2020 2021 2022 2023

2002, vol.31, no.1 2002, vol.31, no.2 2002, vol.31, no.3 2002, vol.31, no.4 2002, vol.31, no.5 2002, vol.31, no.6

题名作者出版年年卷期
Characterization of a quantum well in an Si/Si{sub}(1-x)Ge{sub}x/Si heterostructure by X-ray diffractometryA. M. Afanas'ev; A. P. Boltaev; R. M. Imamov; E. Kh. Mukhamedzhanov; M. M. Rzaev; M. A. Chuev20022002, vol.31, no.1
Contact TiSi{sub}2 and barrier TiN layers for ULSI multilevel metallizationA. G. Vasiliev; A. A. Orlikovsky; V. V. Rodatis; I. A. Horin20022002, vol.31, no.1
Chemical vapor deposition of silicon oxynitride films onto silicon by the pyrolysis of hexamethyl disilazane with nitrogen-containing additivesO. N. Mittov; N. I. Ponomareva; I. Ya. Mittova; M. N. Bezryadin20022002, vol.31, no.1
Statistical process control in IC manufactureS. A. Strizhkov20022002, vol.31, no.1
Interaction of a microwave and a low-pressure plasma under electron cyclotron resonanceA. B. Petrin20022002, vol.31, no.1
Adiabatic logic circuits: a reviewV. I. Starosel'skii20022002, vol.31, no.1
Synthesis techniques for masterslice combinational logic: a computer-aided evaluationP. N. Bibilo; V. G. Litskevich20022002, vol.31, no.1



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