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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2013
2013, vol.31, no.1
2013, vol.31, no.2
题名
作者
出版年
年卷期
Interface layer in hafnia/Si films as a function of ALD cycles
Pierre-Giovanni Mani-Gonzalez; Milton-Oswaldo Vazquez-Lepe; Francisco Espinosa-Magana; Alberto Herrera-Gomez
2013
2013, vol.31, no.1
Modeling of inductively coupled plasma Ar/Cl_2/N_2 plasma discharge: Effect of N_2 on the plasma properties
Romain Chanson; Ahmed Rhallabi; Marie Claude Fernandez; Christophe Cardinaud; Jean Pierre Landesman
2013
2013, vol.31, no.1
Can surface cracks and unipolar arcs explain breakdown and gradient limits?
Zeke Insepov; Jim Norem
2013
2013, vol.31, no.1
Reorganization of graphite surfaces into carbon micro- and nanoparticles under high flux hydrogen plasma bombardment
Kirill Bystrov; Lenze van der Vegt; Gregory De Temmerman; Cecile Arnas; Laurent Marot
2013
2013, vol.31, no.1
Low emissivity high-temperature tantalum thin film coatings for silicon devices
Veronika Rinnerbauer; Jay J. Senkevich; John D. Joannopoulos; Marin Soljacic; Ivan Celanovic; Robert R. Harl; Bridget R. Rogers
2013
2013, vol.31, no.1
Effects of the gas ambient in thermal activation of Mg-doped p-GaN on Hall effect and photoluminescence
Wei Lu; David Aplin; Arthur R. Clawson; Paul K. L. Yu
2013
2013, vol.31, no.1
Influence of inert gases on the reactive high power pulsed magnetron sputtering process of carbon-nitride thin films
Susann Schmidt; Zsolt Czigany; Grzegorz Greczynski; Jens Jensen; Lars Hultman
2013
2013, vol.31, no.1
Photoluminescence characterization of polythiophene films incorporated with highly functional molecules such as metallophthalocyanine
Hiroaki Kobe; Kazumasa Ohnaka; Hitoshi Kato; Susumu Takemura; Kazuhiro Shimada; Tomoyasu Hiramatsu; Kazunori Matsui
2013
2013, vol.31, no.1
Direct comparison of spectroscopic data with cluster calculations of plutonium dioxide and uranium dioxide
J. G. Tobin; S. W. Yu; B. W. Chung; M. V. Ryzhkov; A. Mirmelstein
2013
2013, vol.31, no.1
Magnetically coupled ultrahigh vacuum manipulator with a sample grabber
Seong Heon Kim; Alex de Lozanne
2013
2013, vol.31, no.1
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