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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2000, vol.18, no.1 2000, vol.18, no.6

题名作者出版年年卷期
Alternating ion bombardment technique for wall surface control in depositive plasma processingK. Nakamura; M. Ohwaki; S. Yoneda; H. Sugai20002000, vol.18, no.1
Amorphous hydrogenated carbon film formation from benzene by electron cyclotron resonance chemical vapor depositionXiao-hua Chen; Zhao Yuan Ning; Dennis W. Hess; Laren M. Tolbert20002000, vol.18, no.1
Analysis of alkali elements in insulators using a CAMECA IMS-6fJ. M. McKinley; F. A. Stevie; C. N. Granger; D. Renard20002000, vol.18, no.1
Annealing effects on the interfacial reactions of Ni on Si{sub}0.76Ge{sub}0.24 and Si{sub}(1-x-y)Ge{sub}xC{sub}yJian-Shing Luo; Wen-Tai Lin; C. Y. Chang; P. S. Shih; F. M. Pan20002000, vol.18, no.1
Automated electron cyclotron resonance plasma enhanced chemical vapor deposition system for the growth of rugate filtersPieter L. Swart; Beatrys M. Lacquet; Anatoli A. Chtcherbakov; Pavel V. Bulkin20002000, vol.18, no.1
Biased target depositionV. V. Zhurin; H. R. Kaufman; J. R. Kahn; T. L. Hylton20002000, vol.18, no.1
Cathodic plasma polymerization and treatment by anode magnetron torch. I. the influence of operating parameters on anode magnetron torch glow dischargeJ. G. Zhao; H. K. Yasuda20002000, vol.18, no.1
Chemical vapor deposition of pyrolytic boron nitride from borazineV. N. Demin; I. P. Asanov; Z. L. Akkerman20002000, vol.18, no.1
Comparative study of a-C:H films for inertial confinement fusion prepared with various hydrocarbon precursors by radio frequency-plasma enhanced chemical vapor depositionM. Theobald; J. Durand; P. Baclet; O. Legaie20002000, vol.18, no.1
Consideration of local shadowing and ion beam voltage effects in the prediction of a surface evolving under ion millingEric J. Klein; W. Fred Ramirez20002000, vol.18, no.1
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