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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2000, vol.18, no.1 2000, vol.18, no.6

题名作者出版年年卷期
A conductance model (approach) for kinetic studies: the Ti-Ta-Si systemJoshua Pelleg; L. Rubinovich20002000, vol.18, no.6
An anomalous erosion of a rectangular magnetron systemEiji Shidoji; Masaharu Nemoto; Takuji Nomura20002000, vol.18, no.6
Angular dependence of SiO{sub}2 etching in a fluorocarbon plasmaByeong-Ok Cho; Sung-Wook Hwang; Gyeo-Re Lee; Sang Heup Moon20002000, vol.18, no.6
Carbon deposition by electron beam cracking of hydrocarbons on Ta{sub}2Zn{sub}3O{sub}8 thin film phosphorsCaroline A. Kondoleon; Phillip Rack; Eric Lambers; Paul Holloway20002000, vol.18, no.6
Change in surface roughness with the thickness of TiO{sub}2 film grown on MgO(001) by Ar-ion beam sputteringTakeshi Uchitani; Kunisuke Maki20002000, vol.18, no.6
Characterization of step coverage change in ultraviolet-transparent plasma enhanced chemical vapor deposition silicon nitride filmsJ. Bierner; M. Jacob; H. Schonherr20002000, vol.18, no.6
Codeposition on diamond film surface during reactive ion etching in SF{sub}6 and O{sub}2 plasmasK. Teii; M. Hori; T. Goto20002000, vol.18, no.6
Control of the radio-frequency wave form at the chuck of an industrial oxide-etch reactorLee Berry; Helen Maynard; Paul Miller; Tony Moore; Michael Pendley; Victoria Resta; Dennis Sparks; Qingyun Yang20002000, vol.18, no.6
Dependence of optical properties on structural and compositional parameters in CuGaSe{sub}2R. Diaz; T. Martin; J. M. Merino; M. Leon; F. Rueda20002000, vol.18, no.6
Depth distribution of Bi{sup}+ and Fe{sup}+ implanted into polyimide (C{sub}22H{sub}10N{sub}2O{sub}5){sub}nKe-Ming Wang; Hui Hu; Fei Lu; Feng Chen; Jiang-Hua Zhang; Xiang-Dong Liu; Ji-Tian Liu; Bo Wu; Mu-Bin Huang20002000, vol.18, no.6
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