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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2008, vol.26, no.1
2008, vol.26, no.2
2008, vol.26, no.3
2008, vol.26, no.4
2008, vol.26, no.5
2008, vol.26, no.6
题名
作者
出版年
年卷期
Magnetron sputtered Si-B-C-N films with high oxidation resistance and thermal stability in air at temperatures above 1500℃
Jaroslav Vlcek; Stanislav Hreben; Jiri Kalas; Jiri Capek; Petr Zeman; Radomir Cerstvy; Vratislav Perina; Yuichi Setsuhara
2008
2008, vol.26, no.5
Investigation of the suppression effect of polyethylene glycol on copper electroplating by electrochemical impedance spectroscopy
Chi-Cheng Hung; Wen-Hsi Lee; Ying-Lang Wang; Din-Yuen Chan; Gwo-Jen Hwang
2008
2008, vol.26, no.5
Silane injection in a high-density low-pressure plasma system and its influence on the deposition kinetics and material properties of O{sub}2
R. Botha; B. Haj Ibrahim; P. Bulkin; B. Drevillon
2008
2008, vol.26, no.5
Low energy secondary ion mass spectrometry with sub-keV O{sub}2{sup}+ beams at glancing incidence
Z. X. Jiang; K. Kim; T. Guenther; B. Robichaud; J. Benavides; L. Contreras; D. D. Sieloff
2008
2008, vol.26, no.5
Measurement of reactive and condensable gas permeation using a mass spectrometer
Xiao Dong Zhang; Jay S. Lewis; Charles B. Parker; Jeffrey T. Glass; Scott D. Wolter
2008
2008, vol.26, no.5
Identification and quantification of iron silicide phases in thin films
D. R. Miquita; J. C. Gonzalez; M. I. N. da Silva; W. N. Rodrigues; M. V. B. Moreira; R. Paniago; R. Ribeiro-Andrade; R. Magalhaes-Paniago; H. -D. Pfannes; A. G. de Oliveira
2008
2008, vol.26, no.5
Structure and mechanical properties of diamondlike carbon films produced by hollow-cathode plasma deposition
H. F. Jiang; X. B. Tian; S. Q. Yang; R. K. Y. Fu; P. K. Chu
2008
2008, vol.26, no.5
Wafer heating mechanisms in a molecular gas, inductively coupled plasma: in situ, real time wafer surface measurements and three-dimensional thermal modeling
M. J. Titus; D. B. Graves
2008
2008, vol.26, no.5
Capillary flow meter for calibrating spinning rotor gauges
Robert F. Berg
2008
2008, vol.26, no.5
Reduction in hydrogen outgassing from stainless steels by a medium-temperature heat treatment
C. D. Park; S. M. Chung; Xianghong Liu; Yulin Li
2008
2008, vol.26, no.5
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