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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2010, vol.28, no.1 2010, vol.28, no.2 2010, vol.28, no.3 2010, vol.28, no.4 2010, vol.28, no.5 2010, vol.28, no.6

题名作者出版年年卷期
On the frequency characteristic of inductor in the filter of Hall thrustersWei Liqiu; Ning Zhongxi; E. Peng; Yu Daren20102010, vol.28, no.5
Interfacial organic layers: Tailored surface chemistry for nucleation and growthKevin J. Hughes; James R. Engstrom20102010, vol.28, no.5
Comparison of the sputter rates of oxide films relative to the sputter rate of SiO_2D. R. Baer; M. H. Engelhard; A. S. Lea; P. Nachimuthu; T. C. Droubay; J. Kim; B. Lee; C. Mathews; R. L. Opila; L. V. Saraf; W. F. Stickle; R. M. Wallace; B. S. Wright20102010, vol.28, no.5
Control of surface roughness during high-speed chemical dry thinning of silicon waferW. Heo; J. H. Ahn; N. E. Lee20102010, vol.28, no.5
Negative real parts of the equivalent permittivity, permeability, and refractive index of sculptured-nanorod arrays of silverYi-Jun Jen; Akhlesh Lakhtakia; Ching-Wei Yu; Yu-Hsiung Wang20102010, vol.28, no.5
Effects of postdeposition annealing on physical and electrical properties of high-k Yb_2TiO_5 dielectricsTung-Ming Pan; Xin-Chang Wu; Li-Chen Yen20102010, vol.28, no.5
Investigation of microstructure, surface morphology, and hardness properties of PtIr films by magnetron sputteringChao-Te Lee; Bo-Heng Liu; Chun-Ming Chang; Yu-Wei Lin20102010, vol.28, no.5
Nanostructured europium oxide thin films deposited by pulsed laser ablation of a metallic target in a He buffer atmosphereH. Luna; D. F. Franceschini; R. Prioli; R. B. Guimaraes; C. M. Sanchez; G. P. Canal; M. D. L. Barbosa; R. M. O. Galvao20102010, vol.28, no.5
Vacuum-calibration apparatus with pressure down to 10~(-10) PaDetian Li; Meiru Guo; Yongjun Cheng; Yan Feng; Dixin Zhang20102010, vol.28, no.5
MD simulations of GaN sputtering by Ar~+ ions: Ion-induced damage and near-surface modification under continuous bombardmentEmilie Despiau-Pujo; Pascal Chabert20102010, vol.28, no.5
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