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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2002, vol.20, no.1
2002, vol.20, no.2
2002, vol.20, no.3
2002, vol.20, no.4
2002, vol.20, no.5
2002, vol.20, no.6
题名
作者
出版年
年卷期
Effects of temperature on electronic properties of nickel phthalocyanine thin sandwich film structures
T. D. Anthopoulos; T. S. Shafai
2002
2002, vol.20, no.2
Infrared spectroscopic study of dimethylaluminum-hydride adsorption on oxidized, hydrogen-terminated, reconstructed Si surfaces
T. Wadayama; K. Takeuchi; K. Mukai; T. Tanabe; A. Hatta
2002
2002, vol.20, no.2
Solid particle production in fluorocarbon plasmas II: gas phase reactions for polymerization
Kazuo Takahashi; Kunihide Tachibana
2002
2002, vol.20, no.2
Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. I. Ar pulsed plasmas
Pramod Subramonium; Mark J. Kushner
2002
2002, vol.20, no.2
Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. II. Ar/Cl{sub}2 pulsed plasmas
Pramod Subramonium; Mark J. Kushner
2002
2002, vol.20, no.2
Synthesis and mechanical properties of boron suboxide thin films
Denis Music; Jochen M. Schneider; Veronika Kugler; Setsuo Nakao; Ping Jin; Mattias Ostblom; Lars Hultman; Ulf Helmersson
2002
2002, vol.20, no.2
Deposition of silicon alloys in an integrated distributed electron cyclotron resonance reactor: oxide, nitride, oxynitrides, and multilayer structures
P. Bulkin; A. Hofrichter; T. Heitz; J. Huc; B. Drevillon; J. J. Benattar
2002
2002, vol.20, no.2
Influence of implantation and annealing on the surface topography of amorphous and polysilicon thin films
R. Edrei; E. N. Shauly; A. Hoffman
2002
2002, vol.20, no.2
Metallization of poly(vinylchloride) by Fe, Ni, Cu, Ag, and Au
S. R. Carlo; C. Perry; Jessica Torres; D. Howard Fairbrother
2002
2002, vol.20, no.2
Effect of O{sub}2 gas partial pressure on mechanical properties of SiO{sub}2 films deposited by radio frequency magnetron sputtering
H. Fujiyama; T. Sumomogi; T. Endo
2002
2002, vol.20, no.2
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