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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



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2000 2001 2002 2003 2004 2005
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2012 2013

2004, vol.22, no.1 2004, vol.22, no.2 2004, vol.22, no.3 2004, vol.22, no.4 2004, vol.22, no.5 2004, vol.22, no.6

题名作者出版年年卷期
Nanoscale fatigue and fracture toughness measurements of multilayered thin film structures for digital micromirror devicesGuohua Wei; Bharat Bhushan; S. Joshua Jacobs20042004, vol.22, no.4
Hydrogen pressure dependence of trench corner rounding during hydrogen annealingHiloshi Kuribayashi; Ryosuke Shimizu; Koichi Sudoh; Hiroshi Iwasaki20042004, vol.22, no.4
Development of a continuous generation/supply system of highly concentrated ozone gas for low-temperature oxidation processShingo Ichimura; Hidehiko Nonaka; Yoshiki Morikawa; Tsuvoshi Noyori; Tetsuya Nishiguchi; Mitsuru Kekura20042004, vol.22, no.4
Power supply with arc handling for high peak power magnetron sputteringD. J. Christie; F. Tomasel; W. D. Sproul; D. C. Carter20042004, vol.22, no.4
Measurement of energy flux at the substrate in a magnetron sputter system using an integrated sensorSamuel D. Ekpe; Steven K. Dew20042004, vol.22, no.4
Exploration of the chemical bonding forms of alkoxy-type organic monolayers directly attached to siliconNagahiro Saito; Sun-Hyung Lee; Noriya Maeda; Riichiro Ohta; Hiroyuki Sugimura; Osamu Takai20042004, vol.22, no.4
Photochemical reaction of organosilane self-assembled monolayer as studied by scanning probe microscopyH. Sugimura; N. Saito; Y. Ishida; I. Ikeda; K. Hayashi; O. Takai20042004, vol.22, no.4
Self-organizing processes in connection with metastable nanocluster statesMichael Rieth; Wolfram Schommers20042004, vol.22, no.4
Simultaneous dynamic stiffness and extension profiles of single titin molecules: Nanomechanical evidence for unfolding intermediatesJeffrey G. Forbes; Kuan Wang20042004, vol.22, no.4
Microelectromechanical system device for calibration of atomic force microscope cantilever spring constants between 0.01 and 4 N/mPeter J. Cumpson; John Hedley; Charles A. Clifford; Xinyong Chen; Stephanie Allen20042004, vol.22, no.4
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