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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2004, vol.22, no.1 2004, vol.22, no.2 2004, vol.22, no.3 2004, vol.22, no.4 2004, vol.22, no.5 2004, vol.22, no.6

题名作者出版年年卷期
High resolution, high speed ultrahigh vacuum microscopyHelmut Poppa20042004, vol.22, no.5
Generation of low-energy neutral beam for Si etchingS. J. Kim; S. J. Wang; J. K. Lee; D. H. Lee; G. Y. Yeom20042004, vol.22, no.5
Infrared reflectance of GaN{sub}(1-x)P{sub}x ternary alloys grown by metalorganic chemical vapor depositionJ. B. Wang; Z. F. Li; W. Lu; D. J. Chen; B. Shen; Y. D. Zheng20042004, vol.22, no.5
Interpretation of stress variation in silicon nitride films deposited by electron cyclotron resonance plasmaM. P. Besland; M. Lapeyrade; F. Delmotte; G. Hollinger20042004, vol.22, no.5
Microstructure and Mg concentration of Mg-Si thin film deposited by ion beam sputtering on glass substrateT. Serikawa; M. Henmi; K. Kondoh20042004, vol.22, no.5
Optical properties of tantalum nitride films fabricated using reactive unbalanced magnetron sputteringS. M. Aouadi; M. Debessai20042004, vol.22, no.5
Evaluation of Schottky barrier height of TiN/p-type Si(100)Joshua Pelleg; A. Douhin20042004, vol.22, no.5
Real-time acoustic sensing and control of metalorganic chemical vapor deposition precursor concentrations delivered from solid phase sourcesL. Henn-Lecordier; J. N. Kidder, Jr.; G. W. Rubloff20042004, vol.22, no.5
Wide range flow sensor-Vacuum through viscous flow conditionsHemi Sagi; Yabin Zhao; S. T. Wereley20042004, vol.22, no.5
Effect of nano-crystallization of high velocity oxy-fuel-sprayed amorphous NiCrBSi alloy on properties of the coatingsChang-Jiu Li; Yu-Yue Wang; Hua Li20042004, vol.22, no.5
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