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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2006, vol.24, no.1
2006, vol.24, no.2
2006, vol.24, no.3
2006, vol.24, no.4
2006, vol.24, no.5
2006, vol.24, no.6
题名
作者
出版年
年卷期
Interaction of SO{sub}2 with Zircaloy-4 surfaces at various temperatures
N. Stojilovic; R. D. Ramsier
2006
2006, vol.24, no.5
Design of a vapor transport deposition process for thin film materials
G. M. Hanket; B. E. McCandless; W. A. Buchanan; S. Fields; R. W. Birkmire
2006
2006, vol.24, no.5
Wide-range vibratory vacuum gauge
Dominic J. Thurmer; John C. Price
2006
2006, vol.24, no.5
Advanced chemical vapor deposition silicon carbide barrier technology for ultralow permeability applications
Ludmil Zambov; Ken Weidner; Vasgen Shamamian; Robert Camilletti; Udo Pernisz; Mark Loboda; Glenn Cerny; David Gidley; Hua-Gen Peng; Richard Vallery
2006
2006, vol.24, no.5
Optical properties of amorphous GaAs{sub}(1-x)N{sub}x film sputtering with different N{sub}2 partial pressures
X. M. Teng; H. T. Fan; S. S. Pan; C. Ye; G. H. Li
2006
2006, vol.24, no.5
Optical diagnostics for plasma-surface interaction in CF{sub}4/Ar radio-frequency inductively coupled plasma during Si and SiO{sub}2 etching
Y. Miyoshi; M. Miyauchi; A. Oguni; T. Makabe
2006
2006, vol.24, no.5
Silicon dioxide etching process for fabrication of micro-optics employing pulse-modulated electron-beam-excited plasma
Keigo Takeda; Takayuki Ohta; Masafumi Ito; Masaru Hori
2006
2006, vol.24, no.5
Topography in secondary ion mass spectroscopy images
Srinath Rangarajan; Bonnie J. Tyler
2006
2006, vol.24, no.5
Sorption and desorption behaviors of hexadecane vapors in plasma deposited fluorocarbon films using a quartz crystal microbalance
Sudeep Vaswani; Jere Koskinen; Dennis W. Hess
2006
2006, vol.24, no.5
Chemical and optical properties of thermally evaporated manganese oxide thin films
M. F. Al-Kuhaili
2006
2006, vol.24, no.5
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