先进制造业知识服务平台
国家科技图书文献中心机械分馆 工信部产业技术基础公共服务平台 国家中小企业公共服务示范平台
主页
外文期刊
OA 期刊
电子期刊
外文会议
中文期刊
标准
网络数据库
专业机构
企业门户
起重机械
生产工程
高级检索
关于我们
版权声明
使用帮助
期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2003, vol.21, no.1
2003, vol.21, no.2
2003, vol.21, no.3
2003, vol.21, no.4
2003, vol.21, no.5
2003, vol.21, no.5sup
2003, vol.21, no.6
题名
作者
出版年
年卷期
Thermal stability and hydrogen atom induced etching of nanometer-thick a-Si:H films grown by ion-beam deposition on Si(100) surfaces
J. Biener; C. Lutterloh; M. Wicklein; A. Dinger; J. Kuppers
2003
2003, vol.21, no.4
Photoluminescence of Mg-doped GaN grown by metalorganic chemical vapor deposition
B. Z. Qu; Q. S. Zhu; X. H. Sun; S. K. Wan; Z. G. Wang; H. Nagai; Y. Kawaguchi; K. Hiramatsu; N. Sawaki
2003
2003, vol.21, no.4
Energetic deposition of niobium thin film by ECR-plasma
G. Wu; H. L. Phillips; R. M. Sundelin
2003
2003, vol.21, no.4
Effect of sputtering pressure on residual stress in Ni films using energy-dispersive X-ray diffraction
J. A. Alfonso; E. D. Greaves; B. Lavelle; L. Sajo-Bohus
2003
2003, vol.21, no.4
Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering
E. Broitman; N. Hellgren; Zs. Czigany; R. D. Twesten; J. Luning; I. Petrov; L. Huning; I. Petrov; L. Hultman; B. C. Holloway
2003
2003, vol.21, no.4
X-ray photoemission spectra and X-ray excited auger spectrum investigation of the electronic structure of Pd{sub}3(PS{sub}4){sub}2
V. Grasso; L. Silipigni
2003
2003, vol.21, no.4
Laser desorption time-of-flight mass spectrometry of fluorocarbon films synthesized by C{sub}4Fe{sub}8/H{sub}2 plasmas
K. Shibagaki; T. Maeda; N. Takada; K. Sasaki; K. Kadota
2003
2003, vol.21, no.4
Pulsed laser ultrahigh vacuum deposited silicon in the presence of excess cesium and oxygen studied with X-ray photoelectron spectroscopy and atomic force microscopy
Cheow-Keong Choo; Katsumi Tanaka; Hiroaki Suzuki; Nobuyuki Saotome; Kouji Ichida
2003
2003, vol.21, no.4
Edison's vacuum technology patents
Robert K. Waits
2003
2003, vol.21, no.4
Low temperature pulsed etching of large glass substrates
L. Dubost; A. Belinger; J. Perrin; R. W. Boswell
2003
2003, vol.21, no.4
1
2
3
4
5
6
7
8
9
10
...
国家科技图书文献中心
全球文献资源网
京ICP备05055788号-26
机械工业信息研究院 2018-2024