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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2003, vol.21, no.1 2003, vol.21, no.2 2003, vol.21, no.3 2003, vol.21, no.4 2003, vol.21, no.5 2003, vol.21, no.5sup
2003, vol.21, no.6

题名作者出版年年卷期
Photodesorption of gases in vacuum glazingN. Ng; R. E. Collins; L. So20032003, vol.21, no.5
Infrared spectrometer attachment assembly for use with vacuum and high-pressure cellsJames A. Wingrave; Andrew V. Teplyakov20032003, vol.21, no.5
Mass spectral resolution of F{sup}+ and H{sub}3O{sup}+ in very high vacuumC. R. Cole; R. A. Outlaw; R. L. Champion; D. H. Baker; B. C. Holloway20032003, vol.21, no.5
Influence of sputtering conditions on microstructure and mechanical properties of Zr-Si-N films prepared by radio-frequency-reactive sputteringM. Zhou; M. Nose; Y. Deguchi; T. Mae; K. Nogi20032003, vol.21, no.5
X-ray photoelectron spectroscopy and secondary electron yield analysis of AS and Cu samples exposed to an accelerator environmentR. A. Rosenberg; M. W. McDowell; Q. Ma; K. C. Harkay20032003, vol.21, no.5
Surface reaction of bis(tertbutyIimido)bIs(diethylamIdo)tungsten precursor on Si(100)-(2×1)Jin-Bao Wu; Yaw-wen Yang; Yi-Feng Lin; Hsin-Tien Chiu20032003, vol.21, no.5
Ultrathin copper aluminum and nickel alominlde protective oxidation studied with an x-ray photoelectron spectrometerJ. F. Moore; M. P. McCann; M. J. Pellin; A. Zinovev; J. N. Hryn20032003, vol.21, no.5
The role of trapped Ar atoms in the mechanical properties of boron carbide films deposited by de-magnetron sputteringL. G. Jacobsohn; R. D. Averitt; M. Nastasi20032003, vol.21, no.5
Corrosion behavior of sputter-deposited TiN thin filmsR. J. Martin-Palma; M. Manso; J. M. Martinez-Duart; A. Conde; J. J. Damborenea20032003, vol.21, no.5
Optimization of secondary Ion mass spectrometry detection limit for N inSiCA. L. Pivovarov; F. A. Stevie; D. P. Griffis; G. M. Guryanov20032003, vol.21, no.5
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