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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2003, vol.21, no.1 2003, vol.21, no.2 2003, vol.21, no.3 2003, vol.21, no.4 2003, vol.21, no.5 2003, vol.21, no.5sup
2003, vol.21, no.6

题名作者出版年年卷期
Effects of titanium content on sol-gel hard optical films prepared in an organic-inorganic hybrid systemWenxiu Que; X. Hu20032003, vol.21, no.6
Effects of ion beam application on the deposition of low-resistivity titanium nitride films onto siliconKatsuhiro Yokota; Kazuhiro Nakamura; Tomohiko Kasuya; Katsuhisa Mukai; Masami Ohnishi20032003, vol.21, no.6
Mechanical and tribological properties of sub- and superstoichiometric Ti-C and Ti-Si-C films deposited by magnetron sputtering-pulsed laser depositionJ. E. Krzanowski; J. J. Nainaparampil; A. R. Phani20032003, vol.21, no.6
Etching characteristics and mechanism of Au thin films in inductively coupled Cl{sub}2/Ar plasmaA. M. Efremov; Dong-Pyo Kim; Chang-II Kim20032003, vol.21, no.6
Characterization of B-C-N hybrid prepared by ion implantationIwao Shimoyama; Yuji Baba; Sekiguchi Tetsuhiro; Krishana G. Nath20032003, vol.21, no.6
Stable and unstable behavior of inductively coupled electronegative dischargesA. M. Marakhtanov; M. Tuszewski; M. A. Liebermarn; A. J. Lichtenberg; P. Chabert20032003, vol.21, no.6
Fluorinated ethylene propylene copolymer coating for the stability enhancement of electroactive and photoactive systemsLuping Zhao; K. G. Neoh; Yan Zhang; E. T. Kang20032003, vol.21, no.6
Control of pressure rise in a vacuum chamber by boron nitride and copper composite coatingTetsuo Oishi; Youko Konishi; Masahiro Goto; Akira Kasahara; Masahiro Tosa; Kazuhiro Yoshihara20032003, vol.21, no.6
Fe-doped photocatalytic TiO{sub}2 film prepared by pulsed dc reactive magnetron sputteringWenjie Zhang; Ying Li; Shenglong Zhu; Fuhui Wang20032003, vol.21, no.6
Antimony segregation in the oxidation of AlAsSb interlayersA. M Andrews; K. L. van Horn; T. Mates; J. S. Speck20032003, vol.21, no.6
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