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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2003, vol.21, no.1 2003, vol.21, no.2 2003, vol.21, no.3 2003, vol.21, no.4 2003, vol.21, no.5 2003, vol.21, no.5sup
2003, vol.21, no.6

题名作者出版年年卷期
Growth of highly c-axis textured AlN films on Mo electrodes for film bulk acoustic wave resonatorsSi-Hyung Lee; Jeon-Kook Lee; Ki Hyun Yoon20032003, vol.21, no.1
Tribological properties of nitrogen-containing amorphous carbon film produced by dc plasma chemical vapor depositionWei Zhang; Koichiro Wazumi; Akihiro Tanaka; Yoshinori Koga20032003, vol.21, no.1
Changes in photoluminescence of SrS:Ce induced by synchrotron radiationFumio Sato; Tatsuya Nakamura; Katsu Tanaka; Satoshi Aihara; Nobuo Saito; Katsuaki Inoue; Naoto Yagi; Jun-ichiro Mizuki20032003, vol.21, no.1
Ionization-assisted deposition of strontium electron injection layer for organic light emitting diodeKuniaki Tanaka; Hiroaki Usui20032003, vol.21, no.1
Interaction of hydrogen-terminated Si(100),(110), and (111) surfaces with hydrogen plasma investigated by in situ real-time infrared absorption spectroscopyMasanori Shinohara; Takayuki Kuwano; Yosuke Akama; Hiroyasu Ishida; Rikizo Hatakeyama; Yasuo Kimura; Michio Niwano20032003, vol.21, no.1
Particle-size dependence of alloy phase formation in isolated particles in the In-Sn systemJ. G. Lee; H. Mori20032003, vol.21, no.1
Time-resolved investigation of the surface chemical modification of poly(ethylene naphthalate) by nitrogen plasma treatmentJ. M. Grace; H. K. Zhuang; L. J. Gerenser; D. R. Freeman20032003, vol.21, no.1
Surface analysis by secondary-ion mass spectroscopy during etching with gas-cluster ion beamD. B. Fenner; Y. Shao20032003, vol.21, no.1
Characterization of damage in reactive ion etched ZnTeQixin Guo; Yuichi Matsumoto; Tooru Tanaka; Mitsuhiro Nishio; Hiroshi Ogawa20032003, vol.21, no.1
Texture development of CeO{sub}2 thin films deposited by ion beam assisted depositionJ. Wang; R. Fromknecht; G. Linker20032003, vol.21, no.1
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