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期刊

ISSN	0734-2101
刊名	Journal of Vacuum Science & Technology
参考译名	真空科学与技术，A辑：真空、表面与膜
收藏年代	2000～2013

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2000	2001	2002	2003	2004	2005
2006	2007	2008	2009	2010	2011
2012	2013

2001, vol.19, no.1	2001, vol.19, no.2	2001, vol.19, no.3	2001, vol.19, no.4, P. I	2001, vol.19, no.4, P. II	2001, vol.19, no.5
2001, vol.19, no.6

题名

作者

出版年

年卷期

Synthesis of BN{sub}x-SiN{sub}y composite films by multisource plasma chemical vapor deposition

Ryozo Nonogaki; Suzuya Yamada; Masahiro Ibukiyama; Tetsuya Wada

2001

2001, vol.19, no.5

Effect of film density on electrical properties of indium tin oxide films deposited by dc magnetron reactive sputtering

S. K. Choi; J. I. Lee

2001

2001, vol.19, no.5

Dynamic mixing deposition of niobium nitride films by cathodic arc plasma in ambient nitrogen

T. Zhang; J. H. Song; X. B. Tian; P. K. Chu; I. G. Brown

2001

2001, vol.19, no.5

Low temperature work function variations of the Au/GaSb(110) interface: experimental results and theoretical model

C. Guasch; A. Doukkali; J. Bonnet

2001

2001, vol.19, no.5

Solid particle production in fluorocarbon plasmas. I. correlation with polymer film deposition

Kazuo Takahashi; Kunihide Tachibana

2001

2001, vol.19, no.5

Vapor-phase oxidation during pulsed laser deposition of SrBi{sub}2 Ta{sub}2O{sub}9

C. Christou; A. Garg; Z. H. Barber

2001

2001, vol.19, no.5

Stabilization of zinc-blende cubic AIN in AIN/W superlattices

I. W. Kim; A. Madan; M. W. Guruz; V. P. Dravid; S. A. Barnett

2001

2001, vol.19, no.5

Effects of wall contamination on consecutive plasma processes

H. K. Yasuda; Q. S. Yu; C. M. Reddy; C. E. Moffitt; D. M. Wieliczka

2001

2001, vol.19, no.5

Changes in surface states during epitaxial growth of BaTiO{sub}3 on SrTiO{sub}3 substrate in connection with composition deviation

K. Shimoyama; K. Kubo; M. Iida; K. Yamabe; T. Maeda

2001

2001, vol.19, no.5

Relationship of etch reaction and reactive species flux in C{sub}4F{sub}8/Ar/O{sub}2 plasma for SiO{sub}2 selective etching over Si and Si{sub}3N{sub}4

Miyako Matsui; Tetsuya Tatsumi; Makoto Sekine

2001

2001, vol.19, no.5

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